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Problem 3: Photolithography using Shipley 1813 You want to create…
Problem 3: Photolithography using Shipley 1813You want to create the photo pattern for an array of square etch windows (3um width, 6umcenter-to-center spacing) onto a silicon wafer with a 1μm thick SiO2 barrier layer. You are giventhe positive photoresist Shipley S1813 and wish to coat a 1.2μm thick layer of